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Indandatho yokufakelwa kwe-Alumina PVD yeeNkqubo zokuSusa umphunga oPhilayo
Indandatho yokufakelwa i-PVD yaseSt.Cera yenziwe nge-99.8% ye-alumina ephezulu-ecocekileyo (Al₂O₃) ukuze isetyenziswe kwiinkqubo ze-physical vapor deposition (PVD). Le ndandatho ibonelela ngokwahlukana kombane phakathi kwezinto zegumbi, ithintela ukugoba kunye nokuqinisekisa ukusebenza okuzinzileyo kweplasma. Iimpawu eziphambili ziquka amandla aphezulu e-dielectric (15×10⁶ V/m), ukumelana okuthile >10¹⁴ Ω·mm²/m, kunye nozinzo lobushushu ukuya kuthi ga kwi-1600°C. Amandla ethu okulungisa ngokuchanekileyo afikelela kwiidayamitha zangaphandle ukuya kuthi ga kwi-600mm, iidayamitha zangaphakathi ukuya kuthi ga kwi-0.2mm, ukuthamba kwe-0.003mm, kunye nokugqitywa komphezulu we-Ra0.1. Ukungaguquguquki kweringi kunye nokungaguquguquki kweekhemikhali kuqinisekisa ukuthembeka kwexesha elide kwiindawo ezirhabaxa.
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Izixhobo zeCeramic zeAlumina zeNkqubo yokuVuthela i-E-Gun
I-St.Cera ivelisa izinto ze-alumina ceramic ezicocekileyo kakhulu eziyi-99.8% ezenzelwe ngokukodwa iinkqubo zokufuma ze-electron beam (E-gun). Ezi nxalenye ziquka ii-crucible liners, izikhuselo ze-beam deflector, ii-insulators, kunye nezixhobo zokufakela. Ezi zinto zinika amandla aphezulu e-dielectric (15×10⁶ V/m), uzinzo lobushushu olufikelela kwi-1600°C, kunye nokumelana okuhle kakhulu nokutshatyalaliswa kobushushu kunye nokuhlaselwa ngamakhemikhali kwizinto eziphuma emkhenkceni. Amandla ethu okulungisa ngokuchanekileyo afezekisa iijometri ezintsonkothileyo ezinobukhulu obuncinci beempawu eziyi-0.2mm, ubuthe tyaba obuyi-0.003mm, kunye nokugqitywa komphezulu we-Ra0.1. Inxalenye nganye ihlolwe yi-100% CMM ukuze ifumane ukuchaneka kobukhulu.
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Iplati yeCeramic yeAlumina enkulu enefomathi enkulu yeSemiconductor kunye neMishini
I-St.Cera ivelisa iipleyiti ezinkulu zeseramikhi ezivela kwi-99.8% ye-alumina ephezulu ecocekileyo (Al₂O₃) enobukhulu obuphezulu obufikelela kwi-1500mm ubude kunye ne-600mm ububanzi. Amandla ethu okusila ngokuchanekileyo afikelela kwi-0.003mm ngaphezulu kwe-100mm kunye nokulingana kwe-0.002mm, okuqinisekisa umgangatho womphezulu ohambelanayo kwizicelo zendawo enkulu. Ubukhulu bufikelela kwi-100mm, ukugqitywa komphezulu kufikelele kwi-Ra0.1. Ezi pleyiti zisebenza njengeziseko ze-vacuum chuck, ii-heater platens, iiphaneli zokufakelwa kombane, kunye nee-process chamber floors kwi-semiconductor, display, kunye ne-photovoltaic manufacturing. Kukho ii-through-holes, ii-counterbores, kunye ne-edge profiling.
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Indandatho yeCeramic yeAlumina echanekileyo yokutywina, ukugquma kunye nokulungisa
Isangqa se-ceramic sikaSt.Cera senziwe ngomatshini ochanekileyo ukusuka kwi-99.8% ye-alumina ephezulu-ecocekileyo (Al₂O₃) kwizicelo ezifuna ukumelana nokuguguleka okuphezulu, ubushushu bombane, kunye nokuzinza kobushushu ukuya kuthi ga kwi-1600°C. Amandla ethu okuvelisa axhasa ububanzi bangaphandle ukuya kuthi ga kwi-600mm, ubukhulu ukuya kuthi ga kwi-100mm, kunye nobubanzi bangaphakathi obuncinci njenge-0.2mm, kunye nobukhulu obuyi-0.003mm, ukulingana kwe-0.002mm, kunye nokuqina kwe-0.01mm. Ifumaneka njengeeringi zesitywino, iiringi ze-spacer, iiringi zokugcina, okanye iiprofayili ezenziwe ngokwezifiso. Ukungabi na-porosity kwezixhobo kunye nokungasebenzi kakuhle kweekhemikhali kwenza ukuba zilungele iindawo ezinoburhalarhume zeekhemikhali kunye ne-plasma.
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Ityhubhu yeCeramic ye-Alumina ecocekileyo kakhulu yokusingqongileyo okushushu kakhulu kunye nokubola
Ityhubhu yeseramikhi yaseSt.Cera yenziwe nge-99.8% ye-alumina ecocekileyo kakhulu (Al₂O₃), enika uzinzo oluhle kakhulu lobushushu ukuya kuthi ga kwi-1600°C, amandla aphezulu e-dielectric (15×10⁶ V/m), kunye nokumelana okuphezulu kweekhemikhali. Amandla ethu okulungisa ngokuchanekileyo avumela ububanzi bangaphakathi obuncinci njenge-0.2mm, ububanzi bangaphandle ukuya kuthi ga kwi-600mm, kunye nobude obufikelela kwi-1500mm, ngokuthe tye kwe-0.005mm, ubunzulu be-0.01mm, kunye nokugqitywa komphezulu we-Ra0.1. I-zero porosity yetyhubhu (0% yokufunxwa kwamanzi) ithintela ukuphuma kwegesi kwiindawo zomoya, okwenza ukuba ilungele ii-furniture ze-semiconductor diffusion, ukhuseleko lwe-thermocouple, kunye nokulungiswa kweekhemikhali. Ubukhulu bodonga olwenziwe ngokwezifiso kunye noqwalaselo lwasekupheleni (oluthe tyaba, oluthambileyo, olujijekileyo) luyafumaneka.
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Izixhobo zeCeramic zeAlumina ezenziwe ngokwezifiso zeSemiconductor kunye nezixhobo zoShishino
I-St.Cera ivelisa izixhobo zeseramikhi ezenziwe ngokwezifiso nge-99.8% ye-alumina ecocekileyo kakhulu (Al₂O₃) ngokwemizobo yabathengi. Indawo yethu ixhotyiswe ngoomatshini bokugaya ngokuchanekileyo kunye namaziko oomatshini be-CNC, okuvumela ukuveliswa kwezinto zeseramikhi ezintsonkothileyo ngokuchanekileyo okuphezulu. Izixhobo eziqhelekileyo ziquka ii-insulator, iibhola zokuthwala, iiringi zokutywina, ii-bushings, izixhobo ezenziwe ngokwezifiso, kunye nejometri ezintsonkothileyo. Amandla ethu okuvelisa axhasa
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I-Alumina Ceramic Nozzle yoMjovo weGesi/uFluid obushushu obuphezulu
I-nozzle ye-ceramic kaSt.Cera yenziwe ngokuchanekileyo nge-99.8% ye-alumina ephezulu-ecocekileyo (Al₂O₃), inikezela ukumelana nokuguguleka okuphezulu (Vickers 16 GPa), ukungangeni kweekhemikhali, kunye nokuzinza kobushushu ukuya kuthi ga kwi-1600°C. Amandla ethu okulungisa ngokuchanekileyo afikelela kububanzi obuphakathi obuncinci njenge-0.2mm, ngokuthe tye kwe-0.005mm kunye nokuqina kwe-0.01mm, okuqinisekisa ukuhamba rhoqo kunye nokusasazwa okuchanekileyo kolwelo/igesi. I-nozzle ine-inner bore egudileyo ene-surface finish Ra0.1, enciphisa ukumelana nokuhamba kwaye inciphisa ukuvaleka. I-Orifice diameters ukusuka kwi-0.2mm ukuya kwi-5.0mm, kunye nejometri ezenziwe ngokwezifiso kubandakanya iindawo ezithe tye, ezithambileyo, okanye ezine-multi-orifice outlets. I-nozzle nganye ihlolwa ngokwemilinganiselo kwaye ihlolwe ukuba ukuhamba kuhamba kuyafana na.
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Ipleyiti yokugaya i-Alumina Ceramic ecocekileyo kakhulu yokuGqibela ngokuchanekileyo
Ipleyiti yokugaya ye-ceramic yaseSt.Cera yenziwe nge-99.8% ye-alumina ecocekileyo (Al₂O₃) yokusetyenziswa kokugoba nokugoba ngokuchanekileyo. Amandla ethu okugoba ngokuchanekileyo afikelela kwi-0.003mm, ukulingana kwe-0.002mm, kunye nokugqitywa komphezulu we-Ra0.1, okuqinisekisa ukususwa kwezinto ezifanayo kumphezulu wepleyiti yonke. Ipleyiti inika ukumelana okuhle kokuguguleka (iVickers 16 GPa), amandla aphezulu okugoba (361 MPa), kunye nokuzinza kobushushu ukuya kuthi ga kwi-800°C. Ifumaneka kwiifomathi ezijikelezileyo ukuya kuthi ga kwi-600mm ububanzi kunye neepleyiti eziziingxande ukuya kuthi ga kwi-1500mm ubude. Iindawo ezigobileyo (ububanzi begroove 0.5–2.0mm) ziyafumaneka ukuze zisasazwe kwiinkqubo zokugoba ngokuchanekileyo. Ipleyiti nganye ihlolwa nge-laser interferometer kwaye inikwe ingxelo yokulinganisa ngokuchanekileyo.
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Isiphumo Sokuphela Kwe-Alumina Ceramic Esicocekileyo Esiphezulu seRobhothi Zokuphatha I-Wafer
Isixhobo sokugqibela se-alumina ceramic sikaSt.Cera senziwe ngomatshini ochanekileyo kwi-99.8% ye-Al₂O₃ ecocekileyo kakhulu sisebenzisa izixhobo zokugaya ze-CNC ezikumgangatho ophezulu ze-5-axis. Amandla ethu okuvelisa aquka oomatshini bokugaya abachanekileyo kunye namaziko okugaya e-CNC, okuvumela iijiometri ezintsonkothileyo ngokuchanekileyo okuphezulu. Isixhobo sokugqibela sineprofayili encinci (encinci njenge-1.5 mm) kunye nomphetho ophambili othambileyo wokufakwa kwe-wafer egudileyo. Izinto ezisetyenzisiweyo zibonelela ngokuqina okuphezulu (i-Young's modulus 380 GPa), ukumelana nokuguguleka okugqwesileyo, kunye nozinzo lobushushu ukuya kuthi ga kwi-800°C. Iyunithi nganye ilungelelaniswe kakuhle ukuze ifikelele kwi-flatness ye-0.003mm, i-parallelism ye-0.002mm, kunye nokugqitywa komphezulu we-Ra0.1, ukuqinisekisa unxibelelwano oluqhubekayo lwe-wafer kunye nokusebenza okungenazintwana kwiindawo ze-semiconductor FAB. Ifumaneka ngobude ukusuka kwi-150 mm ukuya kwi-450 mm, kunye neejiometri zetiphu ezenziwe ngokwezifiso (i-edge grip, iBernoulli, i-flat) kunye neeflanges zokufaka ukuze zilingane neerobhothi ze-OEM. Iindlela zokugqiba umphezulu ziquka i-lapped, polished, okanye i-ESD dissipative coating (10⁶–10⁹ Ω/sq.).
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I-Alumina Vacuum Chuck yokuDayina nokuGrila ngokuchanekileyo
I-St.Cera's alumina vacuum chuck yenziwe nge-99.8% ye-Al₂O₃ ecocekileyo kakhulu ene-precision-machined vacuum grooves. Amandla ethu okusila ngokuchanekileyo afikelela kwi-0.003mm kunye ne-parallelism ye-0.002mm, ukuqinisekisa ukuba i-wafer ayina-warp fixation ngexesha lokusika, ukusila ngasemva, kunye nokuhlolwa. Le nto inika amandla aphezulu okugoba (361 MPa), ubunzima (16 GPa), kunye nozinzo lobushushu ukuya kuthi ga kwi-800°C. Ifumaneka kwiifomathi ezijikelezileyo ukuya kuthi ga kwi-600mm outer diameter (OD) kunye neemilo ezingxande ukuya kuthi ga kwi-1500mm ubude. Ii-vacuum grooves zenziwe ngokwezifiso (iipateni ze-concentric, radial, okanye grid) ukuze zihambelane neemfuno ezithile zenkqubo. I-chuck nganye ihlolwa nge-laser interferometer kwaye inikwe ingxelo yokuqinisekisa ukuba i-flatness iqinile.
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I-Vacuum Chuck ene-Porous SiC eneMetal-Backed yokuphatha iWafer egobileyo neyincinci
I-St.Cera's metal based ceramic vacuum chuck idibanisa umaleko we-ceramic we-silicon carbide (SiC) onemingxuma kunye nesiseko sesinyithi esenziwe ngokuchanekileyo (i-aluminium okanye intsimbi engatyiwayo). Izinto ze-SiC ezinemingxuma (eziluhlaza okwesibhakabhaka-mnyama, ii-porosity ezingama-35–40%, ubungakanani be-pore 20–30 μm, i-permeability engama-60 ml/cm²·min) zibonelela ngokusasazwa kwe-vacuum okufanayo, okuthambileyo kuwo wonke umphezulu we-wafer, kususa uphawu lomphetho kunye nokuvumela inkxaso engabonakaliyo kwii-wafers ezincinci (≤100 μm) okanye ezigobileyo. Umaleko we-SiC ubonelela ngokwandiswa okuphantsi kobushushu (3.5×10⁻⁶/℃), ukuzinza kobushushu ukuya kuthi ga kwi-1000°C, kunye namandla aphakathi okugoba (32–35 MPa). Isiseko sesinyithi songeza ukuqina kwesakhiwo, ukufakwa lula ngemingxunya enemisonto, kunye nokukhuselwa ekuqhekekeni okubuthathaka. Le chuck ifanelekile ekugayweni ngasemva, ukugaywa, kunye nokulungiswa kwe-wafer yobushushu obuphezulu apho i-vacuum efanayo kunye nokuhambelana kobushushu kubalulekile.
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Ipleyiti yeCeramic ye-Alumina ecocekileyo kakhulu – yokukhusela kunye nobushushu obuphezulu
Ipleyiti yeseramikhi yaseSt.Cera yenziwe nge-99.8% ye-alumina ecocekileyo kakhulu (Al₂O₃), enika amandla aphezulu e-dielectric (15×10⁶ V/m), uzinzo lobushushu olufikelela kwi-1600°C, kunye nokumelana nokuguguleka okugqwesileyo. Iipleyiti zilungelelaniswe ngokuchanekileyo ukuze zifikelele ekubeni zithe tyaba ≤5 μm ngaphezu kwe-100 mm kunye noburhabaxa bomphezulu Ra ≤0.4 μm. Ifumaneka ngobukhulu obuqhelekileyo ukusuka kwi-1 mm ukuya kwi-20 mm, ubungakanani obulungiselelweyo ukuya kuthi ga kwi-500×500 mm. Isetyenziswa njenge-insulators zombane, iziseko ze-heater, ii-chamber liners, kunye ne-vacuum chuck substrates.
