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Isiphumo Sokuphela Kwe-Alumina Ceramic Esicocekileyo Esiphezulu seRobhothi Zokuphatha I-Wafer
Isixhobo sokugqibela se-alumina ceramic sikaSt.Cera senziwe ngomatshini ochanekileyo kwi-99.8% ye-Al₂O₃ ecocekileyo kakhulu sisebenzisa izixhobo zokugaya ze-CNC ezikumgangatho ophezulu ze-5-axis. Amandla ethu okuvelisa aquka oomatshini bokugaya abachanekileyo kunye namaziko okugaya e-CNC, okuvumela iijiometri ezintsonkothileyo ngokuchanekileyo okuphezulu. Isixhobo sokugqibela sineprofayili encinci (encinci njenge-1.5 mm) kunye nomphetho ophambili othambileyo wokufakwa kwe-wafer egudileyo. Izinto ezisetyenzisiweyo zibonelela ngokuqina okuphezulu (i-Young's modulus 380 GPa), ukumelana nokuguguleka okugqwesileyo, kunye nozinzo lobushushu ukuya kuthi ga kwi-800°C. Iyunithi nganye ilungelelaniswe kakuhle ukuze ifikelele kwi-flatness ye-0.003mm, i-parallelism ye-0.002mm, kunye nokugqitywa komphezulu we-Ra0.1, ukuqinisekisa unxibelelwano oluqhubekayo lwe-wafer kunye nokusebenza okungenazintwana kwiindawo ze-semiconductor FAB. Ifumaneka ngobude ukusuka kwi-150 mm ukuya kwi-450 mm, kunye neejiometri zetiphu ezenziwe ngokwezifiso (i-edge grip, iBernoulli, i-flat) kunye neeflanges zokufaka ukuze zilingane neerobhothi ze-OEM. Iindlela zokugqiba umphezulu ziquka i-lapped, polished, okanye i-ESD dissipative coating (10⁶–10⁹ Ω/sq.).
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Isiphumo sokugqibela se-ST.CERA Alumina Ceramic Bernoulli esenziwe ngokwezifiso
Njengomvelisi okhokelayo kwi-ceramic End Effector / Handling Arm, siye sayila i-End Effector / Handling Arm engaqhelekanga ephendula kwiimfuno zelo shishini. I-Bernoulli's Principle-based ceramic End Effector / Handling Arm enokushukumisa kwaye ithuthe i-wafer ngomoya ongenanxibelelwano luninzi.
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Isiphumo sokugqibela se-ESD Ceramic esenziwe ngokwezifiso se-ST.CERA
Ngeempawu zokuxhathisa amaqondo obushushu aphezulu, ukuxhathisa ukugqwala, ukuxhathisa ukurhawuzelelwa kunye nokufakwa kwe-insulation, i-ceramic ingasebenza kwiintlobo ngeentlobo zezixhobo zemveliso ze-semiconductor ezinemeko yobushushu obuphezulu, i-vacuum okanye igesi erhabaxa ixesha elide.
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Isiphumo sokugqibela sokubamba i-Alumina Ceramic esenziwe ngokwezifiso se-ST.CERA
Ngenxa yeempawu zokuxhathisa amaqondo obushushu aphezulu, ukuxhathisa ukugqwala, ukuxhathisa ukurhawuzelelwa kunye nokufakwa kwe-insulation, i-ceramic ingasebenza kwiintlobo ngeentlobo zezixhobo zemveliso ze-semiconductor ezinemeko yobushushu obuphezulu, i-vacuum okanye igesi erhabaxa ixesha elide.
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Isiphumo sokuphela kwetreyi ye-Alumina Ceramic eyenziwe ngokwezifiso ze-ST.CERA
Le yi-ceramic efana netreyi, i-End Effector / Handling Arm esetyenziswa phantsi kwe-vacuum condition.
I-Ceramic End Effector / Handling Arm "iyakwazi ukumelana nobushushu", "ayiphambuki kangako", kwaye "ilula" ngobunzima xa ithelekiswa neyesinyithi.
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Isiphumo sokuphelisa i-vacuum se-ST.CERA esenziwe ngokwezifiso se-Alumina Ceramic
Ngenxa yeempawu zokuxhathisa amaqondo obushushu aphezulu, ukuxhathisa ukugqwala, ukuxhathisa ukurhawuzelelwa kunye nokufakwa kwe-insulation, i-ceramic ingasebenza kwiintlobo ngeentlobo zezixhobo zemveliso ze-semiconductor ezinemeko yobushushu obuphezulu, i-vacuum okanye igesi erhabaxa ixesha elide.
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Isiphumo Sokugqibela se-Alumina Ceramic esenziwe ngokwezifiso se-ST.CERA
I-ST.CERA inikezela nge-ESD coating kunye nezinto ze-ceramic ze-ESD. I-End Effector. Yenziwe ngomgubo we-alumina ococekileyo kakhulu, icutshungulwa ngokucinezela okubandayo kwe-isostatic, ukunyibilikisa ubushushu obuphezulu kunye nokugqitywa ngokuchanekileyo, inokufikelela kumlinganiselo wokunyamezela ukuya kwi-±0.001 mm, ukugqitywa komphezulu yi-Ra 0.1, ukumelana nobushushu yi-1600℃.
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Isiphumo Sokuphela Kwe-Vacuum End ye-ST.CERA esenziwe ngokwezifiso se-Alumina Ceramic
Le yi-ceramic efana netreyi, i-End Effector / Handling Arm esetyenziswa phantsi kwe-vacuum condition.
I-Ceramic End Effector / Handling Arm "iyakwazi ukumelana nobushushu", "ayiphambuki kangako", kwaye "ilula" ngobunzima xa ithelekiswa neyesinyithi.
Ngenxa yeempawu zokuxhathisa amaqondo obushushu aphezulu, ukuxhathisa ukugqwala, ukuxhathisa ukurhawuzelelwa kunye nokufakwa kwe-insulation, i-ceramic ingasebenza kwiintlobo ngeentlobo zezixhobo zemveliso ze-semiconductor ezinemeko yobushushu obuphezulu, i-vacuum okanye igesi erhabaxa ixesha elide.
Yenziwe ngomgubo we-alumina ococekileyo kakhulu, icutshungulwa ngokucinezela okubandayo kwe-isostatic, ukunyibilikisa ubushushu obuphezulu kunye nokugqitywa ngokuchanekileyo, inokufikelela kumlinganiselo wokunyamezela ukuya kwi-±0.001 mm, ukugqitywa komphezulu yi-Ra 0.1, ukumelana nobushushu yi-1600℃.
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Ukuphathwa kweWafer ye-Alumina Ceramic End Effector eyenziwe ngokwezifiso ze-ST.CERA
I-ST.CERA inikezela nge-ESD coating kunye ne-ESD ceramic material End Effector / Handling Arm ene-shaneli engenanto eyakhelwe ngaphakathi. Siziingcali kwindlela yokwenza i-vacuum air channel ngaphakathi kwento enye ngaphandle kokusebenzisa i-glue.
Akukho mngcipheko wokungcola, ukuphuma kwegesi, okanye amasuntswana. I-ST.CERA's vacuum End Effector / Handling Arm eneteknoloji ekhethekileyo yokugquma igqunyiwe ngombane. Singabonelela nangezinto ze-ceramic ze-ESD ezigqunyiwe ngombane ngaphandle kokugqunywa.
Yenziwe ngomgubo we-alumina ococekileyo kakhulu, icutshungulwa ngokucinezela okubandayo kwe-isostatic, ukunyibilikisa ubushushu obuphezulu kunye nokugqitywa ngokuchanekileyo, inokufikelela kumlinganiselo wokunyamezela ukuya kwi-±0.001 mm, ukugqitywa komphezulu yi-Ra 0.1, ukumelana nobushushu yi-1600℃. -
Izixhobo ze-Alumina Ceramic End Effector Semiconductor
Thintela amasuntswana anokuvela kwimiphetho ye-bevel okanye e-engile kunye nomphezulu ongasemva ngelixa ii-wafers zithuthwa okanye zidibana ne-End Effector / Handling Arm.
Kwizikhokelo, kwamkelwe izinto ezithambileyo ezingayonakalisiyo i-wafer.
Ukuncitshiswa kunokwenzeka ngeteknoloji ye-ST.CERA eyakhelwe ngaphakathi ye-vacuum channel engasebenzisi zincamathelisi.
Kunokwenzeka ukwenza imingxunya yokufaka kunye nokutshintsha ubude nobubanzi besiseko apho i-End Effector / Handling Arm ifakwe khona kwirobhothi.
Izinzwa zokuxhoma, izikrufu kunye nezibiyeli ziyafumaneka njengokhetho.
Yenzelwe ukusetyenziswa emoyeni.
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Umatshini weCNC owenziwe ngokwezifiso weSt.Cera Ceramic End Effector
I-ST.CERA inikezela nge-vacuum ceramic End Effector / Handling Arm ene-channel engenanto eyakhelwe ngaphakathi. Siziingcali kwindlela yokwenza i-vacuum air channel ngaphakathi kwento enye ngaphandle kokusebenzisa i-glue.
Akukho mngcipheko wokungcola, ukuphuma kwegesi, okanye amasuntswana. I-ST.CERA's vacuum End Effector / Handling Arm enetshaneli eyakhelwe ngaphakathi ihlala ixesha elide kwaye ingasetyenziswa kumaqondo obushushu aphezulu. Ngaphezu koko, iindleko zethu zokuvelisa zinokuncitshiswa ngokuphelisa ukuhlanganiswa okungeyomfuneko.
Yenziwe ngomgubo we-alumina ococekileyo kakhulu, icutshungulwa ngokucinezela okubandayo kwe-isostatic, ukunyibilikisa ubushushu obuphezulu kunye nokugqitywa ngokuchanekileyo, inokufikelela kumlinganiselo wokunyamezela ukuya kwi-±0.001 mm, ukugqitywa komphezulu yi-Ra 0.1, ukumelana nobushushu yi-1600℃.
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Isiphumo Sokuphela Se-Alumina Anti-Static Ceramic
Ngenxa yeempawu zokuxhathisa amaqondo obushushu aphezulu, ukuxhathisa ukugqwala, ukuxhathisa ukurhawuzelelwa kunye nokufakwa kwe-insulation, i-ceramic ingasebenza kwiintlobo ngeentlobo zezixhobo zemveliso ze-semiconductor ezinemeko yobushushu obuphezulu, i-vacuum okanye igesi erhabaxa ixesha elide.
Yenziwe ngomgubo we-alumina ococekileyo kakhulu, icutshungulwa ngokucinezela okubandayo kwe-isostatic, ukunyibilikisa ubushushu obuphezulu kunye nokugqitywa ngokuchanekileyo, inokufikelela kumlinganiselo wokunyamezela ukuya kwi-±0.001 mm, ukugqitywa komphezulu yi-Ra 0.1, ukumelana nobushushu yi-1600℃.
