Isiphumo Sokuphela Kwe-Vacuum End ye-ST.CERA esenziwe ngokwezifiso se-Alumina Ceramic

Inkcazo emfutshane:

Le yi-ceramic efana netreyi, i-End Effector / Handling Arm esetyenziswa phantsi kwe-vacuum condition.

I-Ceramic End Effector / Handling Arm "iyakwazi ukumelana nobushushu", "ayiphambuki kangako", kwaye "ilula" ngobunzima xa ithelekiswa neyesinyithi.

Ngenxa yeempawu zokuxhathisa amaqondo obushushu aphezulu, ukuxhathisa ukugqwala, ukuxhathisa ukurhawuzelelwa kunye nokufakwa kwe-insulation, i-ceramic ingasebenza kwiintlobo ngeentlobo zezixhobo zemveliso ze-semiconductor ezinemeko yobushushu obuphezulu, i-vacuum okanye igesi erhabaxa ixesha elide.

Yenziwe ngomgubo we-alumina ococekileyo kakhulu, icutshungulwa ngokucinezela okubandayo kwe-isostatic, ukunyibilikisa ubushushu obuphezulu kunye nokugqitywa ngokuchanekileyo, inokufikelela kumlinganiselo wokunyamezela ukuya kwi-±0.001 mm, ukugqitywa komphezulu yi-Ra 0.1, ukumelana nobushushu yi-1600℃.