Isiphumo Sokuphela Kwe-Vacuum End ye-ST.CERA esenziwe ngokwezifiso se-Alumina Ceramic

Inkcazo emfutshane:

Le yi-ceramic efana netreyi, i-End Effector / Handling Arm esetyenziswa phantsi kwe-vacuum condition.

I-Ceramic End Effector / Handling Arm "iyakwazi ukumelana nobushushu", "ayiphambuki kangako", kwaye "ilula" ngobunzima xa ithelekiswa neyesinyithi.

Ngenxa yeempawu zokuxhathisa amaqondo obushushu aphezulu, ukuxhathisa ukugqwala, ukuxhathisa ukurhawuzelelwa kunye nokufakwa kwezinto ezikhuselayo, iseramikhi ingasebenza kwiintlobo ngeentlobo zezixhobo zemveliso ze-semiconductor ezinemeko yobushushu obuphezulu, i-vacuum okanye igesi erhabaxa ixesha elide.

Yenziwe ngomgubo we-alumina ococekileyo kakhulu, icutshungulwa ngokucinezela okubandayo kwe-isostatic, ukunyibilikisa ubushushu obuphezulu kunye nokugqitywa ngokuchanekileyo, inokufikelela kumlinganiselo wokunyamezela ukuya kwi-±0.001 mm, ukugqitywa komphezulu yi-Ra 0.1, ukumelana nobushushu yi-1600℃.