Isiphumo Sokuphela Kwe-Alumina Ceramic Esicocekileyo Esiphezulu seRobhothi Zokuphatha I-Wafer
Isixhobo sokugqibela se-alumina ceramic sikaSt.Cera senziwe ngomatshini ochanekileyo kwi-99.8% ye-Al₂O₃ ecocekileyo kakhulu sisebenzisa izixhobo zokugaya ze-CNC ezikumgangatho ophezulu ze-5-axis. Amandla ethu okuvelisa aquka oomatshini bokugaya abachanekileyo kunye namaziko okugaya e-CNC, okuvumela iijiometri ezintsonkothileyo ngokuchanekileyo okuphezulu. Isixhobo sokugqibela sineprofayili encinci (encinci njenge-1.5 mm) kunye nomphetho ophambili othambileyo wokufakwa kwe-wafer egudileyo. Izinto ezisetyenzisiweyo zibonelela ngokuqina okuphezulu (i-Young's modulus 380 GPa), ukumelana nokuguguleka okugqwesileyo, kunye nozinzo lobushushu ukuya kuthi ga kwi-800°C. Iyunithi nganye ilungelelaniswe kakuhle ukuze ifikelele kwi-flatness ye-0.003mm, i-parallelism ye-0.002mm, kunye nokugqitywa komphezulu we-Ra0.1, ukuqinisekisa unxibelelwano oluqhubekayo lwe-wafer kunye nokusebenza okungenazintwana kwiindawo ze-semiconductor FAB. Ifumaneka ngobude ukusuka kwi-150 mm ukuya kwi-450 mm, kunye neejiometri zetiphu ezenziwe ngokwezifiso (i-edge grip, iBernoulli, i-flat) kunye neeflanges zokufaka ukuze zilingane neerobhothi ze-OEM. Iindlela zokugqiba umphezulu ziquka i-lapped, polished, okanye i-ESD dissipative coating (10⁶–10⁹ Ω/sq.).
Iinkcukacha (zisekelwe kwi-99.8% Al₂O₃kunye nezakhono zokuvelisa zaseSt.Cera):
| Ipropati | Ixabiso |
| Izinto eziphathekayo | I-99.8% ye-Alumina (i-Ivory) |
| Uxinano | 3.93 g/cm³ |
| Amandla okuGuquka | I-361 MPa |
| Ubunzima bukaVickers | 16 GPa |
| IModulus kaYoung | 380 GPa |
| Ukuthe tyaba | 0.003mm |
| Ukufana | 0.002mm |
| Umphezulu wokugqiba | I-Ra0.1 (ipeyintwe/ipolishiwe) |
| Ubushushu obuphezulu bokusebenza | 800°C |
| Uluhlu lobude | 150–450 mm |
Izicelo:
- · Ukudluliselwa kwe-wafer kwiirobhothi ezingenanto kunye nezomoya
- · Izixhobo zokuphelisa okuzenzakalelayo ze-FAB kwiiwafers ezingama-200mm/300mm
- · Ukuphatha i-wafer encinci (kunye nokhetho lwe-ESD)
Amandla okuvelisa:
Oomatshini bethu bokugaya ngokuchanekileyo kunye namaziko okugaya e-CNC avumela ukuveliswa kwezinto ezintsonkothileyo zeseramikhi ezine:
- · Ubude obukhulu bomatshini wokugaya: 1500mm
- · Ububanzi obuphezulu bangaphandle: 600mm
- · Ubuncinci be-diameter yangaphakathi: 0.2mm
- · Ubukhulu obukhulu: 100mm
Ulawulo lwemeko:
Ukuthe tye yi-0.005mm, ukuthe nkqo yi-0.005mm, ukujikeleza yi-0.002mm, ukufana yi-0.002mm, ukuqina yi-0.01mm kuqinisekiswe yi-CMM. Iyunithi nganye icocwa nge-ultrasonic kwaye igumbi lokucoca leClass 100 lipakishwe.
