Isiphumo Sokuphela KweseCeramic Esigqunywe yiTeflon – Umphezulu Onganamatheliyo Wokuphatha I-Wafer Enovakalelo
I-St.Cera's Teflon (PTFE) egqunywe nge-ceramic effector idibanisa i-substrate ye-alumina enamandla aphezulu kunye ne-PTFE egqunywe nge-compact efanayo, engaphantsi kwe-friction (ubukhulu obuyi-15–30 μm). I-coating inika i-coefficient ephantsi kakhulu ye-friction (≤0.1), ukumelana kakuhle kweekhemikhali, kunye neempawu ezinganamatheliyo, ithintela ukunamathela kwe-wafer kunye nokuphelisa ungcoliseko lwangasemva. I-substrate ye-ceramic engaphantsi (99.8% Al₂O₃) inika amandla aphezulu e-flexural (361–1000 MPa), ukumelana nokuguguleka, kunye nozinzo lobushushu ukuya kuthi ga kwi-260°C (umda we-coating). Le effector ifanelekile ukuphatha ii-wafers ezithambileyo, ezincinci, okanye ezinamathelayo (umz., emva kwe-photoresist coating okanye iinkqubo zeekhemikhali).
Iinkcukacha (isekelwe kwi-99.8% Al₂O₃ substrate ene-PTFE coating):
| Ipropati | Ixabiso |
| Izinto ezingaphantsi komhlaba | I-99.8% ye-Alumina (i-Ivory) |
| Izinto zokugquma | I-PTFE (iTeflon) |
| Ubukhulu bokwaleka | 15–30 μm |
| I-Coefficient of Friction (Egqunywe) | ≤0.1 |
| Amandla okuGuquka kweSubstrate (Al₂O₃) | I-361 MPa |
| Ubunzima be-Substrate (Al₂O₃) | 16 GPa |
| Uxinano lwe-substrate | 3.93 g/cm³ |
| Ubushushu obuphezulu bokuSebenza (umda wokugquma) | 260°C |
| Uburhabaxa bomphezulu (ngaphambi kokugquma) | I-Ra ≤0.4 μm |
| Amandla eDielectric (i-substrate) | 15×10⁶ V/m |
Qaphela: Ingubo ye-PTFE inciphisa ubushushu obuphezulu ukuya kuma-260°C; kwizicelo zobushushu obuphezulu, cinga nge-ceramic engagqunywanga okanye ezinye iingubo.
Izicelo:
- · Ukuphatha ii-wafers emva kokufaka i-photoresist coating (indawo encamathelayo)
- · Ukudluliselwa kwee-wafers ezibhityileyo okanye ezibuthathaka (kuthintela ukunamathela)
- · Ukuhlolwa kwee-semiconductor kunye nezixhobo ze-metrology
- · Ukwenziwa kwezinto ngokuzenzekelayo kwigumbi lokucoca apho ungcoliseko lwamasuntswana kufuneka luncitshiswe khona
Inkqubo yoMveliso:
Isiseko se-ceramic esitshisiweyo nesisemgangathweni → ukurhawuzelelwa komphezulu (i-plasma etch okanye i-grit blast) → I-PTFE spray coating → i-heat clining kwi-380°C → uhlolo lokugqibela. I-effector nganye ijongwa ukuba ingakanani na i-coating ubukhulu bayo (i-eddy current), i-adhesion (uvavanyo olunqamlezileyo lwe-ASTM D3359), kunye ne-coefficient of friction.
Ulawulo lwemeko:
Ukuhlolwa okubonakalayo kwe-100% kwimingxunya yepinki okanye amaqamza; ukufana kobukhulu bepeyinti ngaphakathi kwe-±5 μm; akukho kususwa kwe-dimensional emva kovavanyo lwe-90° lokugoba kwikhuphoni yobungqina. Ukujonga ubungakanani bokunyamezelana kwe-OEM (ubude ±0.05 mm, ukuthamba ≤0.1 mm).
Iingenelo ngaphezu kwe-Uncoated okanye ezinye iiCoatings:
- · Umphezulu onganamatheliyo uthintela ukunamathela kunye nokuqhekeka kwe-wafer
- · Eyona coefficient iphantsi yokungqubana phakathi kweengubo zeseramikhi
- · Ukumelana kakuhle kweekhemikhali (ii-asidi, iziseko, izinyibilikisi)
- · Inciphisa ukuveliswa kwamasuntswana ngokuthintela ukudluliselwa kwezinto
Imida (amanqaku malunga nokuphambuka kwezinto):
I-PTFE coating ayiveli kwiitheyibhile zezinto ezibonakalayo ezibonelelweyo (Al₂O₃, ZrO₂, Si₃N₄, BeO). Iipropati ze-substrate zilandela ngokungqongqo iphepha ledatha elibonelelweyo (99.8% Al₂O₃). Iipropati zokugquma zisekelwe kwiinkcukacha ze-PTFE ezisemgangathweni weshishini, njengoko kungekho datha yokugquma enikiweyo. Kwizicelo ezidlula i-260°C, kucetyiswa i-ceramic end effect engagqunywanga.*
Ukwenziwa ngokwezifiso:
Ifumaneka ngobude obuyi-150–1500 mm, iimilo zeencam (i-edge grip, iBernoulli, i-flat), iipateni zeflange zokufakelwa ngokomzobo we-OEM. I-coating engaphelelanga (kuphela iindawo zokudibanisa) okanye i-cover epheleleyo ayinyanzelekanga.
Cela isampulu yokuvavanya ukunamathela kunye nokungqubana.
