I-Alumina Vacuum Chuck yokuDayina nokuGrila ngokuchanekileyo
I-St.Cera's alumina vacuum chuck yenziwe nge-99.8% ye-Al₂O₃ ecocekileyo kakhulu ene-precision-machined vacuum grooves. Amandla ethu okusila ngokuchanekileyo afikelela kwi-0.003mm kunye ne-parallelism ye-0.002mm, ukuqinisekisa ukuba i-wafer ayina-warp fixation ngexesha lokusika, ukusila ngasemva, kunye nokuhlolwa. Le nto inika amandla aphezulu okugoba (361 MPa), ubunzima (16 GPa), kunye nozinzo lobushushu ukuya kuthi ga kwi-800°C. Ifumaneka kwiifomathi ezijikelezileyo ukuya kuthi ga kwi-600mm outer diameter (OD) kunye neemilo ezingxande ukuya kuthi ga kwi-1500mm ubude. Ii-vacuum grooves zenziwe ngokwezifiso (iipateni ze-concentric, radial, okanye grid) ukuze zihambelane neemfuno ezithile zenkqubo. I-chuck nganye ihlolwa nge-laser interferometer kwaye inikwe ingxelo yokuqinisekisa ukuba i-flatness iqinile.
Iinkcukacha (zisekelwe kwi-99.8% Al₂O₃kunye nezakhono zokuvelisa zaseSt.Cera):
| Ipropati | Ixabiso |
| Izinto eziphathekayo | I-99.8% ye-Alumina (i-Ivory) |
| Uxinano | 3.93 g/cm³ |
| Amandla okuGuquka | I-361 MPa |
| Ubunzima bukaVickers | 16 GPa |
| Ububanzi obungaphandle (ubuninzi) | 600mm |
| Ubukhulu (ubuninzi) | 100mm |
| Ubude (ubuninzi) | 1500mm |
| Ukuthe tyaba | 0.003mm |
| Ukufana | 0.002mm |
| Umphezulu wokugqiba | Ra0.1 |
| Ubushushu obuphezulu bokusebenza | 800°C |
Izicelo:
- · Ukusika kunye nokukrola iiwafer (200mm/300mm nangaphezulu)
- · Ukusila ngasemva kwee-wafers ezibhityileyo
- · Ukuhlolwa nokuphonononga amehlo
- · Ukuphathwa okukhulu kwe-substrate
Ukuchaneka kweMveliso:
- · Ukuqina: 0.005mm
- · Ubungakanani obuthe nkqo: 0.005mm
- · Ukujikeleza: 0.002mm
- · Ubunzulu: 0.01mm
