I-Alumina-Based Standard Vacuum Chuck – Ukuqina Okuphezulu Kokusebenza Ngobuchule
Le vacuum chuck esekwe kwi-alumina yenziwe nge-99.8% Al₂O₃, inika umphezulu ogudileyo ongenamibhobho kunye neepateni ze-vacuum groove ezenziwe ngokwezifiso. Inika ubulukhuni obukhethekileyo (i-Young's modulus 380 GPa) kunye nobuthe tyaba (≤3 μm), okwenza ukuba ilungele ukugaywa ngokuchanekileyo, ukugoba, kunye nokusika ii-wafers ze-semiconductor kunye nezinto ezibonakalayo. Ukuqhuba okuphezulu kobushushu bezinto (32 W/m·k) kuqinisekisa ukufana kobushushu ngexesha lokucubungula.
Iinkcukacha(isekelwe kwi-99.8% Al₂O₃):
| Ipropati | Ixabiso |
| Izinto eziphathekayo | I-99.8% ye-Alumina (i-Ivory) |
| Uxinano | 3.93 g/cm³ |
| Amandla okuGuquka | I-361 MPa |
| Ubunzima bukaVickers | 16 GPa |
| IModulus kaYoung | 380 GPa |
| Ukuqhuba kweThermal | 32 W/m·k |
| Ukuthe tyaba | ≤3 μm (ngaphezulu kwe-200mm) |
| Uburhabaxa bomphezulu (icala le-chuck) | I-Ra ≤0.4 μm |
| Ubushushu obuphezulu bokusebenza | 800°C |
Izicelo:
- · Ukusila i-wafer ngasemva (irhabaxa kwaye ithambile)
- · Ukusikwa ngokuchanekileyo kwezinto ezibuthathaka
- · Ukudityaniswa kweziseko zeseramikhi
- · Ukupholisha ilensi ye-optical
Ukuvelisa:
Ukuleqa ngokuchanekileyo kwamacala omabini → ukugoba ngedayimani (ukhetho) → ukujikelezisa umphetho → ukucoca nge-ultrasound → ukuhlolwa kokuthe tyaba kwe-100% nge-laser interferometer.
Aiingenelo:
- · Inkxaso eqinileyo inciphisa ukuphambuka phantsi komthwalo
- · Akukho kuveliswa kwamasuntswana avela kwisakhiwo esinemingxuma
- · Kulula ukuyicoca (iyahambelana nesicoci se-solvent)
- · Ii-vacuum grooves ezinokwenziwa ngokwezifiso (ezingqindilili, ezijikelezayo, iipateni ezenziwe ngokwezifiso)
Ubungakanani obufumanekayo:
Ingqukuva: 100mm, 150mm, 200mm, 300mm; isikwere/unxande xa uceliwe.
Sikwabonelela ngeenguqulelo ezisekelwe kwisinyithi ukuze kubekho amandla aphezulu oomatshini.
