Isiseko seCeramic se-Alumina esiPhucukileyo esiPhakamileyo seMishini yeSemiconductor
Isiseko se-alumina ceramic saseSt.Cera sichanekile ngokwendalo esivela kwi-99.8% ye-Al₂O₃ ecocekileyo kakhulu, enika amandla akhethekileyo e-dielectric (15×10⁶ V/m), uzinzo lobushushu olufikelela kwi-1600°C, kunye nokumelana nokuqhekeka phantsi komthwalo. Ezi cores zisetyenziswa njengezinto zokwakha kwizixhobo zenkqubo yobushushu obuphezulu, iziseko ze-heater, ii-plasma chamber liners, kunye ne-insulators zombane. Ubunzima obuphezulu bezinto (16 GPa) kunye nokufunxwa kwamanzi okuphantsi (0%) kuqinisekisa ukuthembeka kwexesha elide kwiindawo ezinzima.
Iinkcukacha(isekelwe kwi-99.8% Al₂O₃):
| Ipropati | Ixabiso |
| Izinto eziphathekayo | I-99.8% ye-Alumina (i-Ivory) |
| Uxinano | 3.93 g/cm³ |
| Amandla okuGuquka | I-361 MPa |
| Ukuqina Kokwaphuka | 3–4 MPa·m¹/² |
| Ubunzima bukaVickers | 16 GPa |
| IModulus kaYoung | 380 GPa |
| Ukuqhuba kweThermal | 32 W/m·k |
| Ukwanda kobushushu (25-1000°C) | 7.2×10⁻⁶/℃ |
| Amandla eDielectric | 15×10⁶ V/m |
| Ukuchasana Okuthile | >10¹⁴ Ω·mm²/m |
| Ubushushu obuphezulu bokusebenza | 1600°C |
Izicelo:
- · Isiseko seheater see-reactors ze-epitaxial
- · I-liner yegumbi le-plasma kunye neepleyiti zokugquma
- · Izithinteli zombane ezine-voltage ephezulu
- · Isiseko sezixhobo zeerobhothi zokuphatha iiwafer
Ukuvelisa:
Ukucinezela okungabonakaliyo → umatshini oluhlaza → ukucutha kwi-1600°C → ukugaywa kwe-CNC ukuya kubukhulu bokugqibela (± 0.01 mm ukunyamezelana). Isiseko ngasinye sihlolwa yi-CMM kunye nokufunyanwa kweziphene ze-ultrasonic.
Ukuqinisekisa umgangatho:
Isiqinisekiso se-ISO 9001:2015. Uvavanyo lokungena kwedayi kwiimfanta zomhlaba; uvavanyo lwamandla e-dielectric ngokwe-ASTM D149.
Aiingenelo ngaphezu kwezinye izinto zodongwe:
- · Amandla aphezulu e-dielectric kune-zirconia (15 vs <10×10⁶ V/m)
- · Ixabiso eliphantsi kuneSiC kwizicelo ezingezizo zeplasma
- · Ukumelana kakuhle kweekhemikhali kwiihalogen (ngaphandle kweHF)
IiMilo ezenziwe ngokwezifiso:
Iisilinda, iibha zesikwere, iipleyiti, okanye iijometri ezintsonkothileyo. Ubuncinane bobukhulu beempawu yi-0.5 mm.
Nxibelelana nathi ukuze ufumane uyilo oluyisiseko olulungiselelwe wena kunye nenkxaso yokulinganisa ubushushu.
