Indandatho yokufakelwa kwe-Alumina PVD yeeNkqubo zokuSusa umphunga oPhilayo
Indandatho yokufakelwa i-PVD yaseSt.Cera yenziwe nge-99.8% ye-alumina ephezulu-ecocekileyo (Al₂O₃) ukuze isetyenziswe kwiinkqubo ze-physical vapor deposition (PVD). Le ndandatho ibonelela ngokwahlukana kombane phakathi kwezinto zegumbi, ithintela ukugoba kunye nokuqinisekisa ukusebenza okuzinzileyo kweplasma. Iimpawu eziphambili ziquka amandla aphezulu e-dielectric (15×10⁶ V/m), ukumelana okuthile >10¹⁴ Ω·mm²/m, kunye nozinzo lobushushu ukuya kuthi ga kwi-1600°C. Amandla ethu okulungisa ngokuchanekileyo afikelela kwiidayamitha zangaphandle ukuya kuthi ga kwi-600mm, iidayamitha zangaphakathi ukuya kuthi ga kwi-0.2mm, ukuthamba kwe-0.003mm, kunye nokugqitywa komphezulu we-Ra0.1. Ukungaguquguquki kweringi kunye nokungaguquguquki kweekhemikhali kuqinisekisa ukuthembeka kwexesha elide kwiindawo ezirhabaxa.
Iinkcukacha (zisekelwe kwi-99.8% Al₂O₃kunye nezakhono zokuvelisa zaseSt.Cera):
| Ipropati | Ixabiso |
| Izinto eziphathekayo | I-99.8% ye-Alumina (i-Ivory) |
| Uxinano | 3.93 g/cm³ |
| Amandla okuGuquka | I-361 MPa |
| Ubunzima bukaVickers | 16 GPa |
| Amandla eDielectric | 15×10⁶ V/m |
| Ukuchasana Okuthile | >10¹⁴ Ω·mm²/m |
| Ububanzi obuphezulu bangaphandle | 600mm |
| Ububanzi obuncinci bangaphakathi | 0.2mm |
| Ubukhulu obukhulu | 100mm |
| Ukuthe tyaba | 0.003mm |
| Ukufana | 0.002mm |
| Umphezulu wokugqiba | Ra0.1 |
| Ubushushu obuphezulu bokusebenza | 1600°C |
Izicelo:
- · Ii-insulators ze-back plate ezijolise ngqo kwiinkqubo ze-PVD
- · Izithinteli zokungenisa umoya egumbini
- · Izithinteli zeringi yesihlangu kwiinkqubo zokutshiza
- · Ukwahlulwa kwe-voltage ephezulu kwiigumbi zeplasma
Ukuchaneka kweMveliso:
Ubunzulu: 0.01mm, ukujikeleza: 0.002mm, ukuthe tye: 0.005mm, ukuthe nkqo: 0.005mm, ukuqina: 0.005mm, ukuqinisekiswa yiCMM.
AIingenelo ngaphezu kwePolymer Insulators:
- · Imelana nobushushu obuyi-1600°C xa kuthelekiswa nomda we-polymer ongaphantsi kwama-300°C
- · Akukho kukhupha igesi – kugcina ukuqina kwe-vacuum
- · Iyamelana nokukhukuliseka kweplasma kunye nokuhlaselwa ziikhemikhali
Ukwenziwa ngokwezifiso:
Iinxalenye ezinqamlezileyo ezenziwe ngokwezifiso, iimpawu zokufakelwa, iiprofayili zenyathelo, kunye noyilo lweeringi ezininzi eziqinileyo ziyafumaneka.
