Iplati yeCeramic yeAlumina enkulu enefomathi enkulu yeSemiconductor kunye neMishini
I-St.Cera ivelisa iipleyiti ezinkulu zeseramikhi ezivela kwi-99.8% ye-alumina ephezulu ecocekileyo (Al₂O₃) enobukhulu obuphezulu obufikelela kwi-1500mm ubude kunye ne-600mm ububanzi. Amandla ethu okusila ngokuchanekileyo afikelela kwi-0.003mm ngaphezulu kwe-100mm kunye nokulingana kwe-0.002mm, okuqinisekisa umgangatho womphezulu ohambelanayo kwizicelo zendawo enkulu. Ubukhulu bufikelela kwi-100mm, ukugqitywa komphezulu kufikelele kwi-Ra0.1. Ezi pleyiti zisebenza njengeziseko ze-vacuum chuck, ii-heater platens, iiphaneli zokufakelwa kombane, kunye nee-process chamber floors kwi-semiconductor, display, kunye ne-photovoltaic manufacturing. Kukho ii-through-holes, ii-counterbores, kunye ne-edge profiling.
Iinkcukacha (zisekelwe kwi-99.8% Al₂O₃kunye nezakhono zokuvelisa zaseSt.Cera):
| Ipropati | Ixabiso |
| Izinto eziphathekayo | I-99.8% ye-Alumina (i-Ivory) |
| Uxinano | 3.93 g/cm³ |
| Amandla okuGuquka | I-361 MPa |
| Ubunzima bukaVickers | 16 GPa |
| Amandla eDielectric | 15×10⁶ V/m |
| Ubude obuphezulu | 1500mm |
| Ububanzi Obuphezulu | 600mm |
| Ubukhulu obukhulu | 100mm |
| Ubuthe tyaba (nge-100mm nganye) | 0.003mm |
| Ukufana | 0.002mm |
| Umphezulu wokugqiba | I-Ra0.1 (ipeyintwe/ipolishiwe) |
| Ubushushu obuphezulu bokusebenza | 1600°C |
Izicelo:
- · Iipleyiti zesiseko se-vacuum chuck zee-wafer ezinkulu kunye neepaneli
- · Iipleyiti zeheater zezixhobo zokucubungula ubushushu
- · Iiphaneli zokukhusela umbane kwiinkqubo ze-voltage ephezulu
- · Ukulungisa umgangatho wegumbi kunye neepleyiti ze-liner
Ukuchaneka kweMveliso:
Ukuthe tye: 0.005mm, ukuthe nkqo: 0.005mm, kuqinisekiswe nge-laser interferometer.
Iingenelo ngaphezu kweePlati zeSinyithi:
- · Akukho kungcoliswa kwesinyithi – kubalulekile kwiinkqubo ze-semiconductor
- · Akukho gesi iphumayo – ifanelekile kwiindawo ezine-vacuum
- · Ukumelana nokuguguleka okuphezulu kunye nokumelana neekhemikhali
Ukwenziwa ngokwezifiso:
Iipateni zemingxuma ezenziwe ngokwezifiso, iiprofayili zomphetho, iindawo ezinezitebhisi, kunye neendawo zokufakelwa ezenziwe ngesinyithi ziyafumaneka.
