Ipleyiti yeCeramic ye-Alumina ecocekileyo kakhulu – yokukhusela kunye nobushushu obuphezulu
Ipleyiti yeseramikhi yaseSt.Cera yenziwe nge-99.8% ye-alumina ecocekileyo kakhulu (Al₂O₃), enika amandla aphezulu e-dielectric (15×10⁶ V/m), uzinzo lobushushu olufikelela kwi-1600°C, kunye nokumelana nokuguguleka okugqwesileyo. Iipleyiti zilungelelaniswe ngokuchanekileyo ukuze zifikelele ekubeni zithe tyaba ≤5 μm ngaphezu kwe-100 mm kunye noburhabaxa bomphezulu Ra ≤0.4 μm. Ifumaneka ngobukhulu obuqhelekileyo ukusuka kwi-1 mm ukuya kwi-20 mm, ubungakanani obulungiselelweyo ukuya kuthi ga kwi-500×500 mm. Isetyenziswa njenge-insulators zombane, iziseko ze-heater, ii-chamber liners, kunye ne-vacuum chuck substrates.
Iinkcukacha (zisekelwe kwi-99.8% Al₂O₃):
| Ipropati | Ixabiso |
| Izinto eziphathekayo | I-99.8% ye-Alumina (i-Ivory) |
| Uxinano | 3.93 g/cm³ |
| Amandla okuGuquka | I-361 MPa |
| Amandla eDielectric | 15×10⁶ V/m |
| Ukuchasana Okuthile | >10¹⁴ Ω·mm²/m |
| Ukuqhuba kweThermal | 32 W/m·k |
| Ukwanda kobushushu (25-1000°C) | 7.2×10⁻⁶/℃ |
| Ubushushu obuphezulu bokusebenza | 1600°C |
| Ubuthe tyaba (nge-100 mm nganye) | ≤5 μm |
| Ukunyamezela Ubukhulu | ± 0.05 mm |
| Uburhabaxa bomphezulu | I-Ra ≤0.4 μm |
Izicelo:
- · Iipleyiti zokukhusela umbane kwizixhobo ze-voltage ephezulu
- · Iipleyiti zokuxhasa i-heater kwii-oven zokusasazwa
- · Iilayini zegumbi ze-CVD/PVD
- · Iipleyiti zesiseko zee-vacuum chucks
Iingenelo:
- · Ukufunxwa kwamanzi yi-0% – akukho kukhupha igesi kwi-vacuum
- · Ayisebenzi ngokweekhemikhali – ayixhathisi kwii-asidi kunye nee-halogen (ngaphandle kwe-HF)
Ukwenziwa ngokwezifiso:
Kukho imingxunya, ii-cutouts, i-edge rounding, kunye ne-metallization.
