Ipleyiti yoSasazo lweGesi yeAlumina ye-CVD/PVD Showerhead
Ipleyiti yokusasaza igesi yaseSt.Cera (intloko yeshawa) yenziwe ngomatshini ochanekileyo owenziwe nge-99.8% alumina ceramic ecocekileyo kakhulu. Inemibhobho emincinci (ububanzi obuyi-0.3–1.5 mm) eqinisekisa ukuhamba kwegesi okufanayo kumphezulu we-wafer ngexesha leenkqubo ze-CVD, PVD, okanye ze-ALD. Amandla aphezulu e-dielectric yepleyiti (>15×10⁶ V/m) kunye nokumelana neplasma kwenza kube yimfuneko ekufakweni kwefilimu encinci ye-semiconductor.
Iinkcukacha:
| Ipropati | Ixabiso |
| Izinto eziphathekayo | 99.8% Al₂O₃ okanye iSiC |
| Ububanzi | 100 – 1500mm (ingqukuva) okanye uxande |
| Ubukhulu | 5 – 20 mm |
| Ububanzi beHole | 0.3 – 1.5 mm |
| Iphethini yeHole | Ngokwezifiso (unxantathu, isikwere, i-radial) |
| Ukuthe tyaba | ≤10 μm kwindawo epheleleyo |
| Uburhabaxa bomphezulu | I-Ra ≤0.6 μm (icala legesi) |
| Umlinganiselo Wendawo Evulekileyo | 5–15% |
Izicelo:
Iipleyiti zeshawa zePECVD
Ii-injector zegesi ze-ALD
Iipleyiti zokusasazwa kwegesi kwigumbi lokugcada
Izixhobo ze-reactor ze-MOCVD
Ukuvelisa:
I-substrate ye-Alumina idibene tyaba → Ukubhola nge-CNC ngezixhobo ezigqunywe ngedayimani (ukunyamezela indawo yomngxuma ±0.02 mm) → ukususa iimbumbulu → ukucoca nge-ultrasonic → ukupakisha kweKlasi 100.
Ulawulo lwemeko:
Ipleyiti nganye ihlolwa ngokupheleleyo ngobukhulu bemingxuma (inkqubo yokubona), ukuba ithambile (i-laser interferometer), kunye nokufana kokuhamba kwegesi (imephu yoxinzelelo). Akukho mikroskopu incinci phantsi kwe-20x microscope.
Iingenelo ngaphezu kweePlati zeSinyithi:
Akukho kungcoliswa kwesinyithi kwiifilimu ezincinci
Ukuveliswa kwamasuntswana asezantsi (akukho ziqhuma zokubola)
Iyamelana neeplasma zokucoca ezibukhali (CF₄, NF₃)
Iimpawu ezenziwe ngokwezifiso:
Iitshaneli zegesi ezingasemva, imingxunya ebhobokileyo, izitywini zomphetho, kunye neendidi ezahlukeneyo zezinto (i-SiC yokuqhuba okuphezulu kobushushu, i-Y₂O₃ coating yokumelana ne-plasma).
Sinikezela ngokuqinisekiswa kweCAD kunye nokulinganisa ukuhamba kwemveliso ngaphambi kokuba yenziwe.
