I-Porous Ceramic Vacuum Chuck yokuphatha iWafer eWarped
I-St.Cera's porous ceramic chuck yenziwe nge-high-purity alumina ene-porosity evulekileyo efanayo ye-30–45% kunye nobukhulu be-pore obuqala kwi-10 ukuya kwi-100 μm. Ngokungafaniyo nee-groove chucks eziqhelekileyo, umphezulu we-porous ubonelela nge-vacuum esasazekileyo kuyo yonke i-wafer ngasemva, ibamba ngokufanelekileyo ii-wafers ezigobileyo, ezibhityileyo, okanye ezingenanto ngaphandle kokuphakamisa okanye ukwaphuka komphetho. I-vacuum ethambileyo (ehlengahlengiswayo nge-restrictor) ikwathintela ukuphawulwa kwe-backside.
Iinkcukacha(isekelwe kwi-99.6% Al₂O₃):
| Ipropati | Ixabiso |
| Ukugquma | 30–45% |
| Ubungakanani bePore ephakathi | 10–100 μm (inokukhetheka) |
| Amandla okuGuquka | ≥250 MPa |
| Ubude (ngaphezulu kwe-300mm) | ≤5 μm |
| Umphezulu wokugqiba | I-Lapped (Ra 0.8 μm) |
| Inqanaba eliphezulu leVacuum | -80 kPa |
| Ubushushu bokusebenza | 400°C (umoya), 600°C (ongangeniyo) |
| Izinto eziphathekayo | 99.6% Al₂O₃, ZrO₂, okanye i-SiC |
Izicelo:
I-wafer encinci (≤50 μm) yokusila ngasemva
Ukufakelwa kwe-wafer egobileyo yokusika
Ukuchola idayisi efakwe kwiteyiphu
Ukuphathwa kwephaneli yeglasi
Ukuvelisa kunye noMgangatho:
Umgubo weseramikhi oxutywe nee-organic pore formers → zicinezelwe → zityibilikisiwe → zidibene ukuya kubukhulu bokugqibela. I-chuck nganye ivavanywa ukuhamba kwamanzi ukuze ibone ukuba ifana kangakanani na (≤5% deviation) kwaye ihlolwe ukuba isasazwa kangakanani na i-pore size (SEM). Ubungangamsha bulinganiswa nge-laser interferometer.
Iingenelo ngaphezu kweeGrooved Chucks:
Akukho uphawu lwe-wafer edge okanye i-die shift
Ibamba iiwafers ezigobileyo (ukuya kuthi ga kwi-500 μm isaphetha)
Iphelisa ukuvaleka kwemingxunya ye-vacuum
Inkxaso yokuzilinganisa ngokwayo kwi-substrates ezincinci
Ukwenziwa ngokwezifiso:
Iimilo ezingqukuva okanye ezibuxande, ezinobukhulu obufikelela kwi-600 mm. Singazifaka iiringi zokutywina ezisemacaleni okanye izahlulo ze-vacuum zone. Iinguqulelo ezisekelwe kwisinyithi ziyafumaneka kwiimfuno zokuqina okuphezulu.
Cela isampuli yobungakanani be-wafer yakho kunye novavanyo lwe-warpage.
