Iphini yokuxhasa iCeramic yeMixtures yeNkqubo yeSemiconductor
Iipini ezixhasayo ze-ceramic zikaSt.Cera (ezaziwa ngokuba ziipini zokuphakamisa okanye iipini zokuxhasa) zisetyenziswa kwiindawo zenkqubo ye-semiconductor ukuphakamisa ii-wafers okanye ii-substrates ngexesha lokuphatha, ukufudumeza, okanye ukupholisa. Zenziwe nge-99.8% ye-alumina okanye i-silicon nitride, ezi pini zinika amandla aphezulu okuxinzelela, uzinzo lobushushu, kunye nokumelana neekhemikhali. Uyilo lwe-hemispherical okanye oluthe tyaba luthintela ukukrwela ii-wafer.
Iinkcukacha(I-Alumina 99.8%):
| Ipropati | Ixabiso |
| Izinto eziphathekayo | 99.8% Al₂O₃ okanye iSi₃N₄ |
| Ubude | 10 – 100 mm |
| Ububanzi | 1 – 10 mm |
| Imo yeNcam | Ithe tyaba, ijikeleze i-hemisphere, itsolo |
| Amandla Oxinzelelo (Al₂O₃) | >2000 MPa |
| Ubushushu bokuSebenza obuPhezulu (Al₂O₃) | 1600°C |
| Umphezulu wokugqiba | I-Lapped (Ra ≤0.4 μm) |
| Ukunyamezelana kwiDayamitha | ± 0.01 mm |
Izicelo:
Izikhonkwane zokuphakamisa kwiigumbi ze-CVD/PVD
Izikhonkwane zenkxaso yokubhaka i-hotplate
Izakhiwo zenkxaso yekhadi le-probe
Izikhephe ze-quartz ezixhasa isitovu somlilo
Ukuvelisa:
Ukusila ngokuchanekileyo ngaphandle kwembindi we-OD → ukusila kwedayimani yeprofayili yencam → ukucocwa nge-ultrasonic → ukuhlolwa okulinganayo kwe-100%.
Ulawulo lwemeko:
I-CMM yobude/ububanzi, i-optical comparator ye-tip radius, uvavanyo lomthwalo ukuqinisekisa amandla okuxinzelela (isampulu engacwangciswanga nge-lot). Akukho kungcoliswa kwe-ferromagnetic (kuqinisekiswe nge-magnet).
Iingenelo ngaphezu kweePini zeMetal okanye zeQuartz:
Ubomi obude ngokuphindwe kahlanu kunentsimbi engagqwaliyo
Akukho kungcoliswa kwesinyithi kwigumbi lenkqubo
Amandla obushushu aphezulu kune-quartz (1600°C vs 1100°C)
Umphezulu onganamatheliyo (ukunamathela okuncitshisiweyo kwamasuntswana)
Ukwenziwa ngokwezifiso:
Iiprofayili ezininzi zeencam, isiseko esinemisonto, okanye umngxuma onciphileyo.
Sikwabonelela ngee-SiC pins kwiindawo ezixineneyo zeplasma.
