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Ityhubhu yeSikhokelo seCeramic echanekileyo yokubopha iWire kunye neDie Attach
Ityhubhu yokukhokela ye-ceramic yaseSt.Cera yenziwe nge-99.5% ye-alumina okanye i-yttria-stabilized zirconia, enika ukumelana nokuguguleka okuphezulu kunye ne-inner bore egudileyo (Ra ≤0.2 μm). Ezi tyhubhu zizinto ezibalulekileyo kwii-wire bonders, oomatshini bokudibanisa ii-die, kunye nezixhobo zokukhetha kunye nokubeka, ii-guiding bonding wire, ii-capillaries, okanye ii-vacuum nozzles ezingenazo ii-friction ezininzi kwaye azinazo ii-particle contamination.
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Isiseko seCeramic se-Alumina esiPhucukileyo esiPhakamileyo seMishini yeSemiconductor
Isiseko se-alumina ceramic saseSt.Cera sichanekile ngokwendalo esivela kwi-99.8% ye-Al₂O₃ ecocekileyo kakhulu, enika amandla akhethekileyo e-dielectric (15×10⁶ V/m), uzinzo lobushushu olufikelela kwi-1600°C, kunye nokumelana nokuqhekeka phantsi komthwalo. Ezi cores zisetyenziswa njengezinto zokwakha kwizixhobo zenkqubo yobushushu obuphezulu, iziseko ze-heater, ii-plasma chamber liners, kunye ne-insulators zombane. Ubunzima obuphezulu bezinto (16 GPa) kunye nokufunxwa kwamanzi okuphantsi (0%) kuqinisekisa ukuthembeka kwexesha elide kwiindawo ezinzima.
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I-Alumina-Based Standard Vacuum Chuck – Ukuqina Okuphezulu Kokusebenza Ngobuchule
Le vacuum chuck esekwe kwi-alumina yenziwe nge-99.8% Al₂O₃, inika umphezulu ogudileyo ongenamibhobho kunye neepateni ze-vacuum groove ezenziwe ngokwezifiso. Inika ubulukhuni obukhethekileyo (i-Young's modulus 380 GPa) kunye nobuthe tyaba (≤3 μm), okwenza ukuba ilungele ukugaywa ngokuchanekileyo, ukugoba, kunye nokusika ii-wafers ze-semiconductor kunye nezinto ezibonakalayo. Ukuqhuba okuphezulu kobushushu bezinto (32 W/m·k) kuqinisekisa ukufana kobushushu ngexesha lokucubungula.
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I-ST.CERA eyenzelwe i-Alumina Ceramic Ring kunye ne-Ceramic Disc
Zenziwe ngokucinezela okubandayo kwe-isostatic kwaye zitshiswe phantsi kobushushu obuphezulu, emva koko zenziwe ngomatshini kwaye zipolishwe ngokuchanekileyo, iindawo ezingasetyenziswayo zeseramikhi zinokuhlangabezana nazo naziphi na iimfuno ezingqongqo zezixhobo ze-semiconductor kunye neempawu zazo zokuxhathisa ukuguguleka, ukumelana nokugqwala, ukwanda okuphantsi kobushushu, kunye nokufakelwa. Iiseramikhi zinokusebenza kwiintlobo ezininzi zezixhobo zemveliso ye-semiconductor ezinemeko yobushushu obuphezulu, i-vacuum okanye igesi erhabaxa ixesha elide.
Yenziwe ngomgubo we-alumina ococekileyo kakhulu, icutshungulwa ngokucinezela okubandayo kwe-isostatic, ukunyibilikisa ubushushu obuphezulu kunye nokugqitywa ngokuchanekileyo, inokufikelela kumlinganiselo wokunyamezela ukuya kwi-±0.001 mm, ukugqitywa komphezulu yi-Ra 0.1, ukumelana nobushushu yi-1600℃.
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Izixhobo zeSemiconductor zeCeramic Chuck eziBalaseleyo
Zenziwe ngokucinezela okubandayo kwe-isostatic kwaye zitshiswe phantsi kobushushu obuphezulu, emva koko zenziwe ngomatshini kwaye zipolishwe ngokuchanekileyo, iindawo ezingasetyenziswayo zeseramikhi zinokuhlangabezana nazo naziphi na iimfuno ezingqongqo zezixhobo ze-semiconductor kunye neempawu zazo zokuxhathisa ukuguguleka, ukumelana nokugqwala, ukwanda okuphantsi kobushushu, kunye nokufakelwa. Iiseramikhi zinokusebenza kwiintlobo ezininzi zezixhobo zemveliso ye-semiconductor ezinemeko yobushushu obuphezulu, i-vacuum okanye igesi erhabaxa ixesha elide.
Yenziwe ngomgubo we-alumina ococekileyo kakhulu, icutshungulwa ngokucinezela okubandayo kwe-isostatic, ukunyibilikisa ubushushu obuphezulu kunye nokugqitywa ngokuchanekileyo, inokufikelela kumlinganiselo wokunyamezela ukuya kwi-±0.001 mm, ukugqitywa komphezulu yi-Ra 0.1, ukumelana nobushushu yi-1600℃.
