Ingalo yeRobhothi yeAlumina Ceramic ecocekileyo ephezulu yokuphatha iWafer
Ingalo yerobhothi ye-alumina ceramic yaseSt.Cera yenziwe ngokuchanekileyo nge-99.8% ye-Al₂O₃ (i-alumina) ecocekileyo kakhulu. Idibanisa amandla angaqhelekanga okugoba (361 MPa), ubunzima obuphezulu (16 GPa), kunye noxinano oluphantsi (3.93 g/cm³), nto leyo ebangela ukuba ingalo ibe lula kodwa iqine ukuze kudluliselwe i-wafer ye-semiconductor. I-coefficient yokwandiswa kobushushu bezinto (7.2×10⁻⁶/°C) ihambelana ne-silicon ngokusondeleyo, nto leyo enciphisa ukungalingani kobushushu ngexesha lokucubungula.
Iinkcukacha (isekelwe kwi-99.8% Al₂O₃):
| Ipropati | Ixabiso |
| Umbala | I-Ivory |
| Uxinano | 3.93 g/cm³ |
| Amandla okuGuquka | I-361 MPa |
| Ubunzima bukaVickers | 16 GPa |
| IModulus kaYoung | 380 GPa |
| Ukuqhuba kweThermal | 32 W/m·k |
| Ukwandiswa kobushushu | 7.2×10⁻⁶/℃ |
| Amandla eDielectric | 15×10⁶ V/m |
Izicelo:
- Iirobhothi zokuhambisa i-vacuum wafer (200mm/300mm)
- Iinkqubo zokuphatha umoya
- Iingalo zokuphelisa ukusebenza kwe-FAB automation
Inkqubo yoMveliso:
Ukucinezela okungabonakaliyo → umatshini oluhlaza → ukucocwa kwe-sintering kwi-1600°C → Ukusila ngokuchanekileyo kwe-CNC → ukucoca nge-ultrasonic → Ukupakisha igumbi lokucoca leklasi ye-100. Ingalo nganye ihlolwa yi-CMM nge-100% ukuze ibone ukuba ithe tyaba (± 0.01 mm) kunye noburhabaxa bomphezulu (Ra ≤0.4 μm).
Ulawulo lwemeko:
I-St.Cera inesiqinisekiso se-ISO 9001:2015. Senza uvavanyo lokungena kwedayi kwiimfanta ezincinci, ukugoba kwamanqaku amathathu ukuze sibone amandla e-flexural, kunye novavanyo lwamandla e-dielectric ngokwe-ASTM D149.
Iingenelo ngaphezu kweengalo zesinyithi:
- Ikhaphukhaphu ngama-50% kunentsimbi engagqwaliyo
- Akukho monakalo we-galvanic
- Ukuveliswa kwamasuntswana aphantsi (≤0.05 amasuntswana/cm²)
- Ingubo ekhuselekileyo ye-ESD iyafumaneka (10⁶–10⁹ Ω/sq)
Ukwenziwa ngokwezifiso:
Ubude ukusuka kwi-150mm ukuya kwi-450mm, iimilo zencam (i-edge grip, iBernoulli, i-vacuum), kunye neepateni zeflange zokufaka ngokwemizobo ye-OEM. Iiprototypes kwiiveki ezi-2.
Ukuba ufuna iiodolo ezininzi, nceda ucele ikowuteshini.
