Indandatho yeSeal ye-Alumina Ceramic ecocekileyo kakhulu yokutywinwa kwegumbi lobushushu obuphezulu
Indandatho yesitywino se-ceramic yaseSt.Cera yenzelwe njengendlela eyahlukileyo kwiindandatho ze-polymer O kwiindawo ezigqithisileyo apho ii-elastomers ziwohloka khona. Yenziwe nge-99.8% ye-alumina ecocekileyo kakhulu (Al₂O₃), le ndandatho yesitywino eqinileyo isetyenziswa kwiindawo zokutywina ezingashukumiyo — zihlala zidibene ne-gasket yesinyithi ethambileyo okanye i-graphite — ukubonelela nge-vacuum okanye i-gas containment ethembekileyo kumaqondo obushushu afikelela kwi-800°C nakwiindawo ezirhabaxa ze-plasma okanye zeekhemikhali. Le nto ayiniki gesi iphumayo, amandla aphezulu okuxinzelela (amandla angaphantsi e-flexural 361 MPa), kunye nokungasebenzi kakuhle kweekhemikhali (ukuxhathisa ii-halogens, ii-acids, kunye ne-alkalis ngaphandle kwe-HF). Iindawo zokutywina ezifakwe ngokuchanekileyo (ukuthe tyaba ≤5 μm, ukurhabaxa komphezulu we-Ra ≤0.2 μm) ziqinisekisa ukudibana okuqinileyo nentsimbi edibanayo okanye izinto ze-ceramic.
Iinkcukacha(isekelwe kwi-99.8% Al₂O₃):
| Ipropati | Ixabiso |
| Izinto eziphathekayo | I-99.8% ye-Alumina (i-Ivory) |
| Uxinano | 3.93 g/cm³ |
| Ukufunxwa kwamanzi | 0% |
| Amandla okuGuquka | I-361 MPa |
| Amandla oxinzelelo (esicatshulwe) | >2000 MPa |
| Ubunzima bukaVickers | 16 GPa |
| Ukwanda kobushushu (25–1000°C) | 7.2×10⁻⁶/℃ |
| Ubushushu obuphezulu bokusebenza | 800°C (umoya), 1600°C (ongangeniyo) |
| Umphezulu ugqityiwe (ubuso bokuvala) | I-Ra ≤0.2 μm (idibene) |
| Ubuthe tyaba (nge-25 mm nganye) | ≤5 μm |
| Izinga lokuVuza kweHelium | <1×10⁻¹⁰ Pa·m³/s (kunye ne-gasket efanelekileyo) |
Izicelo:
- · Iiseal zegumbi lenkqubo ye-semiconductor static (i-CVD, i-PVD, i-etch)
- · Izivalo zomnyango wesithando somlilo ezishushu kakhulu
- · Iiflanges zokuhambisa umoya
- · Ukuvalwa kweenqanawa ze-reactor zekhemikhali
Inkqubo yoMveliso:
Ukucinezela okungabonakaliyo → ukunyibilikisa kwi-1600°C → ukugoba ngokuchanekileyo emacaleni amabini ukuze kufunyanwe ubuso obuthe tyaba kakhulu nobugudileyo bokuvala → ukugoba komphetho → ukucoca nge-ultrasonic. Isangqa ngasinye sivavanywa ngokupheleleyo kwi-100% yokuvuza kwisixhobo sokubona ukuvuza se-helium esine-gasket yesinyithi eqhelekileyo.
Ulawulo lwemeko:
- · Ukujonga ubukhulu beCMM (ID, OD, ubukhulu, ukufana)
- · Iprofilometer yomphezulu weRa kunye nokujiya
- · Ukulinganisa ukutyibilika kusetyenziswa i-optical flat
- · Uvavanyo lokuvuza kweHelium (indlela yoxinzelelo lomqolo)
Iingenelo ngaphezu kwee-Polymer O-rings:
- · Ukumelana ne-800 ° C vs. <300 ° C yeFFKM
- · Akukho gesi iphumayo — akukho kungcoliswa kwendalo engenamoya
- · Ayichasani nazo zonke iikhemikhali zeplasma (i-fluorine, i-chlorine, i-oxygen)
- · Akukho seti yokucinezelwa okanye ukuguqulwa okusisigxina
- · Ubomi obungenamda benkonzo kwiindawo ezicocekileyo
Imida (Iingxelo ezibalulekileyo):
- · Ayisiyo i-O-ring— yindandatho yeseramikhi eqinileyo efuna i-gasket ethambileyo (ubhedu, i-aluminium, okanye i-graphite) ukuze ivalwe.
- · Ayilungelanga intshukumo eguquguqukayo okanye ukungalingani kweflange enkulu.
- · Ixabiso lokuqala liphezulu kunee-polymer O-rings, kodwa ixesha elide lokusebenzisa izinto linciphisa iindleko zobunini.
- · I-brittle — phatha ngononophelo; phepha ukubetheka okanye ukugoba.
Phawula:Idatha engentla ilandela ngokungqongqo itheyibhile yepropati ye-Al₂O₃ enikiweyo. Akukho datha yezinto ze-elastomeric ezinikiweyo. Le mveliso yiringi yesitywina esingashukumiyo, ayiyoringi ye-elastomeric O-ring. Nceda uqinisekise ukuba oku kuyahlangabezana neemfuno zesicelo sakho.
