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Izixhobo zeSemiconductor ezenziwe ngokwezifiso zeST.CERA IiChucks zeCeramic
Zenziwe ngokucinezela okubandayo kwe-isostatic kwaye zitshiswe phantsi kobushushu obuphezulu, emva koko zenziwe ngomatshini kwaye zipolishwe ngokuchanekileyo, iindawo ezingasetyenziswayo zeseramikhi zinokuhlangabezana nazo naziphi na iimfuno ezingqongqo zezixhobo ze-semiconductor kunye neempawu zazo zokuxhathisa ukuguguleka, ukumelana nokugqwala, ukwanda okuphantsi kobushushu, kunye nokufakelwa. Iiseramikhi zinokusebenza kwiintlobo ezininzi zezixhobo zemveliso ye-semiconductor ezinemeko yobushushu obuphezulu, i-vacuum okanye igesi erhabaxa ixesha elide.
Yenziwe ngomgubo we-alumina ococekileyo kakhulu, icutshungulwa ngokucinezela okubandayo kwe-isostatic, ukunyibilikisa ubushushu obuphezulu kunye nokugqitywa ngokuchanekileyo, inokufikelela kumlinganiselo wokunyamezela ukuya kwi-±0.001 mm, ukugqitywa komphezulu yi-Ra 0.1, ukumelana nobushushu yi-1600℃.
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Izixhobo zeCeramic zeSemiconductor Probe Equipment
Zenziwe ngokucinezela okubandayo kwe-isostatic kwaye zitshiswe phantsi kobushushu obuphezulu, emva koko zenziwe ngomatshini kwaye zipolishwe ngokuchanekileyo, iindawo ezingasetyenziswayo zeseramikhi zinokuhlangabezana nazo naziphi na iimfuno ezingqongqo zezixhobo ze-semiconductor kunye neempawu zazo zokuxhathisa ukuguguleka, ukumelana nokugqwala, ukwanda okuphantsi kobushushu, kunye nokufakelwa. Iiseramikhi zinokusebenza kwiintlobo ezininzi zezixhobo zemveliso ye-semiconductor ezinemeko yobushushu obuphezulu, i-vacuum okanye igesi erhabaxa ixesha elide.
Yenziwe ngomgubo we-alumina ococekileyo kakhulu, icutshungulwa ngokucinezela okubandayo kwe-isostatic, ukunyibilikisa ubushushu obuphezulu kunye nokugqitywa ngokuchanekileyo, inokufikelela kumlinganiselo wokunyamezela ukuya kwi-±0.001 mm, ukugqitywa komphezulu yi-Ra 0.1, ukumelana nobushushu yi-1600℃.
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Izixhobo zeCeramic ze-Alumina ezicocekileyo eziphezulu zeSemiconductor kunye nezicelo zeMizi-mveliso
I-St.Cera ivelisa iindawo ze-ceramic ze-alumina ezichanekileyo (Al₂O₃) ngokweemfuno zabathengi. Zisebenzisa i-alumina ene-99.8% ephezulu-ecocekileyo, ezi zinto zibonelela ngamandla agqwesileyo okugoba (361 MPa), ubunzima obuphezulu (16 GPa), kunye namandla abalaseleyo e-dielectric (15×10⁶ V/m). Zenzelwe izixhobo ze-semiconductor, ii-assembly ezinganyangekiyo, ii-insulators zombane, kunye nezixhobo zobushushu obuphezulu, ezi zinto zibonelela ngokufunxwa kwamanzi okuphantse kube zero (0%) kunye ne-coefficient yokwandiswa kobushushu ye-7.2×10⁻⁶/℃, ukuqinisekisa uzinzo olulinganayo phantsi kweemeko ezinzima.
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Iphini yokuxhasa iCeramic yeMixtures yeNkqubo yeSemiconductor
Iipini ezixhasayo ze-ceramic zikaSt.Cera (ezaziwa ngokuba ziipini zokuphakamisa okanye iipini zokuxhasa) zisetyenziswa kwiindawo zenkqubo ye-semiconductor ukuphakamisa ii-wafers okanye ii-substrates ngexesha lokuphatha, ukufudumeza, okanye ukupholisa. Zenziwe nge-99.8% ye-alumina okanye i-silicon nitride, ezi pini zinika amandla aphezulu okuxinzelela, uzinzo lobushushu, kunye nokumelana neekhemikhali. Uyilo lwe-hemispherical okanye oluthe tyaba luthintela ukukrwela ii-wafer.
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Isiseko seCeramic se-Alumina esiPhucukileyo esiPhakamileyo seMishini yeSemiconductor
Isiseko se-alumina ceramic saseSt.Cera sichanekile ngokwendalo esivela kwi-99.8% ye-Al₂O₃ ecocekileyo kakhulu, enika amandla akhethekileyo e-dielectric (15×10⁶ V/m), uzinzo lobushushu olufikelela kwi-1600°C, kunye nokumelana nokuqhekeka phantsi komthwalo. Ezi cores zisetyenziswa njengezinto zokwakha kwizixhobo zenkqubo yobushushu obuphezulu, iziseko ze-heater, ii-plasma chamber liners, kunye ne-insulators zombane. Ubunzima obuphezulu bezinto (16 GPa) kunye nokufunxwa kwamanzi okuphantsi (0%) kuqinisekisa ukuthembeka kwexesha elide kwiindawo ezinzima.
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I-ST.CERA eyenzelwe i-Alumina Ceramic Ring kunye ne-Ceramic Disc
Zenziwe ngokucinezela okubandayo kwe-isostatic kwaye zitshiswe phantsi kobushushu obuphezulu, emva koko zenziwe ngomatshini kwaye zipolishwe ngokuchanekileyo, iindawo ezingasetyenziswayo zeseramikhi zinokuhlangabezana nazo naziphi na iimfuno ezingqongqo zezixhobo ze-semiconductor kunye neempawu zazo zokuxhathisa ukuguguleka, ukumelana nokugqwala, ukwanda okuphantsi kobushushu, kunye nokufakelwa. Iiseramikhi zinokusebenza kwiintlobo ezininzi zezixhobo zemveliso ye-semiconductor ezinemeko yobushushu obuphezulu, i-vacuum okanye igesi erhabaxa ixesha elide.
Yenziwe ngomgubo we-alumina ococekileyo kakhulu, icutshungulwa ngokucinezela okubandayo kwe-isostatic, ukunyibilikisa ubushushu obuphezulu kunye nokugqitywa ngokuchanekileyo, inokufikelela kumlinganiselo wokunyamezela ukuya kwi-±0.001 mm, ukugqitywa komphezulu yi-Ra 0.1, ukumelana nobushushu yi-1600℃.
